Venus Series: Plasma Etching and Cleaning Equipment

Venus Series Key Features

PC control system for automated processingPrecise gas flow controlProcess data loggingUnlimited recipe storageVenus equivalents available for all PE models

The fully automated Venus Series have all the features of the standard PE Models but include advanced Windows software and features for greater control over the plasma process. All Venus systems include computerised gas valves for highly accurate and repeatable gas flow rate control.

A laptop loaded with Plasma Etch, Inc. software is included for fully automatic system operation, multiple recipe storage, data logging/trending, events/alarms, and multi-step sequencing.

Additional features include mass flow controllers, dual sequence programming, as well as process data acquisition and archiving.

Models comprise:

Venus PE-25 - For processing up to 75x150mm (3�6?) SamplesVenus PE-50 - For processing up to 100x150mm (4�6?) SamplesVenus PE-50-XL - For processing up to 175mm (7?) SamplesVenus PE-75 - For processing up to 200mm diameter Samples

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Venus Series Technical Downloads

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Plasma Etch Venus Series

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