Low Cost Plasma Cleaner: PE-25

PE-25 Key Features

125mm diameter plasma chamberRobust design, ideal for R&D labs and UniversitiesContinuously variable power settingSimple to program and operateAvailable for rental periods

The PE-25 is an entry-level, low-cost Plasma Cleaner, developed for processing up to 75x150mm samples in research-development labs, production facilities & universities.

The PE-25 is exceptionally user friendly and produces consistent results every time, featuring a robust aluminium chamber, RF powered electrode and automatic process sequence. All timed events (pump-down, plasma, gas stabilization and vent) can be easily programmed, with a one button operation initiating the sequence.

PE-25 features include:

Durable Welded Round Aluminium Vacuum ChamberChamber Dimensions: 200mm Deep x 125mm Diameter (8�5?)Single 90x180mm RF Powered Electrode (3.5�7?)57mm of Chamber Height Clearance (2.5?)150W, 50KHz Continuously Variable Power SupplyAutomatic Matching NetworkOne Rotometer Gas Control: 0-25cc/minThermocouple Vacuum Gauge: 0-1TorrPLC Microprocessor Control SystemKeypad user interface with alphanumeric displayStorage of one Process RecipeAutomatic Process SequencingConsole Dimensions: 355Wx370Dx455H mm (14�14.5�18?)Approximate Shipping weight is 25KgElectrical: 230/240VAC, 14A

Options:

5 CFM 2-Stage Direct Drive Oil Vacuum Pump100 watt, 13.56 MHz RF Generator with auto tuner2nd Rotometer / Gas Inlet

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PE-25 Technical Downloads

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PE-25 Datasheet

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