Industrial Plasma Cleaning System: BT-1

BT-1 Key Features

Free-standing industrial plasma clean and etching equipmentFive 500mm (20") wide x 525mm (21") process shelves Custom chamber and shelf combinationsHigh yield plasma processing solution600W 13.56MHz RF Source with optional higher power supplies availablePlasma cleaning, plasma etching, reactive ion etching configurations

The BT-1 plasma surface treatment system is one of Plasma Etch's most popular and versatile cleaning, plasma etching, and RIE (Reactive Ion Etching) systems. It is presently in operation throughout the world in a multitude of different markets. For example, it is found being used extensively in the medical, semiconductor, electronics, PCB (printed circuit board), industrial manufacturing, and solar markets. When plasma cleaning your product, whether it be small or large plastic parts, medical implants, wafers or electronic components, you will find that all are uniformly treated in the BT-1.

The BT-1 is available in two unique processing configurations:

Regular Plasma Cleaner or Plasma Etcher plasma processing modeRIE - Reactive Ion Etch plasma processing mode

The large all-aluminium chamber accommodates a generously sized active plasma cleaning surface; our standard configuration of five levels of processing shelves provides 13548cm� (2100 square inches) of useable plasma processing area. The console's compact footprint takes up very little space for the work it accomplishes and the system is supplied with a vacuum pump especially prepared for oxygen service. The BT-1 also comes standard with Touch Screen Controls, which makes processing extremely easy.

BT-1 features include:

Welded Aluminium Vacuum ChamberChamber Dimensions 625w x 625d x 525h mmFive 500mm (20") wide x 525 (21") electrode shelvesHorizontal electrode shelves on 75mm (3") spacing600 Watt RF generator @ 13.56 MHzAutomatic Matching NetworkOne 500 SCCM Mass Flow ControllerPirini Vacuum Gauge. Range 0-1 TorrMicroprocessor Control System with Touch Screen20 Two-step recipe storage29 CFM Oxygen service Vacuum pump3 Microns Vacuum Pump Oil FiltrationPlasma Console 1.75 x 0.9 x 0.8M (70x36x32")System Weight 545Kg (1200lbs)Vacuum Pump 0.4 x 0.75 x 0.425M (16x30x17")Vacuum Pump Weight 68Kg (150lbs)Compressed Air Service 80-100 PSI, 0.5 CFMRegulated Process Gases 15 PSI

Please contact us for the full range of options.

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BT-1 Technical Downloads

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BT-1 Datasheet

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