977 Wafer Cleaning Systems

977 Key Features

Efficient compact cleaningAtomizing and High pressure cleaning 200mm or 300mm basic modelsEasy to operate with one touch activationAutomatic lid cover closingProcess monitoring with display status and alarmsStorage capacity of 8 programmable recipesEnvironmentally friendly and safe to operate

The 977 Wafer Cleaner from ADT is a free standing system for cleaning workpieces after dicing.

The 977 is more than just a cleaner, thanks to its robust design and smart user interface it can be extended to perform more complex process oriented stages too.

The system is offered in two basic configurations: ADT-977 supports up to 200mm round substrates and ADT-977L supports up to 300mm substrates. A wide variety of substrate chucks and frame adaptors are available, with custom versions as required.

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977 Wafer Cleaner Technical Downloads

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ADT 977 Wafer Cleaner

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Principles of Dicing

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